Prof. Michel Meunier
Canada Research Chair
Ecole Polytechnique de Montreal
| Organizer:IEEE LEOS |
| Title: Laser Processing of Advanced Materials
for Microelectronics and Nanoelectronics |
| Speaker: Prof. Michel Meunier Canada Research Chair Ecole Polytechnique de Montreal |
| Abstract: Focussing a laser on a material may lead to interesting phenomena, including some phase transformation, diffusion of species and the ejection of the materials. In this talk, I will introduce various laser processes developed at École Polytechnique for the application in microelectronics and nanotechnologies: Molecular dynamics simulation of ultra-fast laser ablation of silicon; Laser induced modification of silicon microdevices (A company called LTRIM Technologies has been funded based on this technology) Nanaostructured silicon thin films produced by Pulsed Laser Ablation; Pulsed CO2 laser induced erosion of a silicon wafer to produce nanostructured photoluminescent silicon; Narrow distributed nanoparticles produced by pulsed laser ablation in liquids |
| Biography: Michel Meunier obtained his PhD from MIT in 1984. In the last 20 years, he has been involved in laser processing of various materials, namely, semiconductors, dielectrics and metals. He holds a Canadian Research Chair on Laser micro/nano-engineering of materials and he his the director of the Laser Processing Laboratory at Ecole Polytechnique in Montreal. He has published over 150 papers and he is the co-founder of LTRIM technology, a company exploiting new laser processing techniques for microelectronics. |
| Time and Location: Thursday, January 23 at 3:00 p.m.. University of Toronto, Galbraith Building, Room 248 The Galbraith Building is located at 35 St. George Street Refreshments will be served. CONTACT: Emanuel Istrate, e.istrate@ieee.org |
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